MEGAPOSIT™ SPR™ 220 Series Thick i‑Line Photoresists
General purpose, multi-wavelength photoresist designed to cover a wide range of film thicknesses with a single-coat process
· Film Thickness 1-14 µm
· Broadband, g-Line and i-Line capable
· Excellent wet and dry etch adhesion
Ancillaries:
· Remover PG
· Remover 1112A
· MF-26A Developer
· Remover 1165
· EBR-10A Edge Bead Remover
Applications:
· DRIE
· Dry Etch
· Plating: Thick Positive Resists
· Bi-layer Lift-off
· Microlenses
MODEL
SPR220-1.2
SPR220-1.5
SPR220-3.0
SPR220-4.5
SPR220-7.0
