UV™ 210GS Positive DUV Photoresist
Multipurpose resist that can be utilized for gate, phase shift mask contact holes, and trench applications in the 180-130 nm CD range
· Compatible with a wide range of substrates including silicon and both organic and inorganic anti-reflective materials
· 150°C thermal stability
Ancillaries:
· CD-26 Developer
· Remover 1165
· EBR-10A Edge Bead Remover
Applications:
· General Lithography: Positive DUV Resists